Electrochemical micromachining of silicon platforms for optical fibre alignment

被引：10

作者：

Guendouz, M

Pedrono, N

Charrier, J

Joubert, P

Le Rouzic, J

机构：

[1] Univ Rennes 1, IUT Lannion, Grp Microelect & Visualisat, F-22302 Lannion, France

[2] France Telecom, CNET, F-22307 Lannion, France

来源：

ELECTRONICS LETTERS | 1997年 / 33卷 / 20期

关键词：

micromachining;

D O I：

10.1049/el:19971166

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The authors present an original and low-cost technique for placing and aligning, optical fibres on silicon platforms. Porous silicon obtained by electrochemical etching in delineated areas is used as a sacrificial material. It is shown that this method, which is not dependent on the crystallographic orientations, provides well-defined grooves.

引用

页码：1695 / 1696

页数：2

共 5 条

[1] ANISOTROPIC ETCHING OF SILICON [J].