Fermi-level-pinning defects in highly n-doped silicon

被引:94
作者
Chadi, DJ [1 ]
Citrin, PH [1 ]
Park, CH [1 ]
Adler, DL [1 ]
Marcus, MA [1 ]
Gossmann, HJ [1 ]
机构
[1] AT&T BELL LABS,LUCENT TECHNOL,MURRAY HILL,NJ 07974
关键词
D O I
10.1103/PhysRevLett.79.4834
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
Eased on first-principles calculations and analysis of x-ray absorption measurements, an unconventional mechanism is proposed for the saturation of carriers in highly it-doped Si. The mechanism is Fermi-level pinning from a new class of defect centers containing two separated but interacting dopant atoms with no associated Si vacancies. The number of such centers increases sharply at high doping levels. A simple model provides very good agreement with the maximum carrier concentrations observed, in Si.
引用
收藏
页码:4834 / 4837
页数:4
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