Evaluation of response time in ball surface-acoustic-wave hydrogen sensor using digital quadrature detector

被引：21
作者：
Abe, Takuji [1 ]
Iwata, Naoya
Tsuji, Toshihiro
Mihara, Tsuyoshi
Akao, Shingo
Noguchi, Kazuhiro
Nakaso, Noritaka
Sim, Dongyoun
Ebi, Yusuke
Fukiura, Takeshi
Tanaka, Hidekazu
Yamanaka, Kazushi
机构：
[1] Tohoku Univ, Grad Sch Engn, Dept Mat Proc, Sendai, Miyagi 9808579, Japan
[2] Toppan Printing Co Ltd, Sugito, Saitama 3458508, Japan
[3] Ball Semicond Inc, Allen, TX 75013 USA
[4] Yamatake Corp, Kanagawa 2518522, Japan
[5] JST CREST, Tokyo 1020075, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2007年 / 46卷 / 7B期
关键词：
ball SAW device; hydrogen sensor; response time; quadrature detector;
D O I：
10.1143/JJAP.46.4726
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Hydrogen leak detection sensors must have high sensitivity and a short response time of 1 s or less. A ball surface-acoustic-wave (SAW) hydrogen sensor has a high sensitivity and can detect hydrogen in a very wide concentration range of 10 ppm to 100%. Moreover, a fast response can be expected because of the very thin sensitive film used. In this study, we developed a digital quadrature detector (DQD) to measure responses of less than 1 s, and measure phases in I ms intervals with excellent sensitivity. We evaluated the response time of the ball SAW hydrogen sensor where the signal was averaged 256 times in 0.256 s using the DQD. As a result, the response time was found to be 1 s or less for 3.0 vol % hydrogen gas in nitrogen.
引用
收藏
页码：4726 / 4728
页数：3
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