Evaluation of response time in ball surface-acoustic-wave hydrogen sensor using digital quadrature detector

被引：22

作者：

Abe, Takuji ^{[1
]}

Iwata, Naoya

Tsuji, Toshihiro

Mihara, Tsuyoshi

Akao, Shingo

Noguchi, Kazuhiro

Nakaso, Noritaka

Sim, Dongyoun

Ebi, Yusuke

Fukiura, Takeshi

Tanaka, Hidekazu

Yamanaka, Kazushi

机构：

[1] Tohoku Univ, Grad Sch Engn, Dept Mat Proc, Sendai, Miyagi 9808579, Japan

[2] Toppan Printing Co Ltd, Sugito, Saitama 3458508, Japan

[3] Ball Semicond Inc, Allen, TX 75013 USA

[4] Yamatake Corp, Kanagawa 2518522, Japan

[5] JST CREST, Tokyo 1020075, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2007年 / 46卷 / 7B期

关键词：

ball SAW device; hydrogen sensor; response time; quadrature detector;

D O I：

10.1143/JJAP.46.4726

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Hydrogen leak detection sensors must have high sensitivity and a short response time of 1 s or less. A ball surface-acoustic-wave (SAW) hydrogen sensor has a high sensitivity and can detect hydrogen in a very wide concentration range of 10 ppm to 100%. Moreover, a fast response can be expected because of the very thin sensitive film used. In this study, we developed a digital quadrature detector (DQD) to measure responses of less than 1 s, and measure phases in I ms intervals with excellent sensitivity. We evaluated the response time of the ball SAW hydrogen sensor where the signal was averaged 256 times in 0.256 s using the DQD. As a result, the response time was found to be 1 s or less for 3.0 vol % hydrogen gas in nitrogen.

引用

页码：4726 / 4728

页数：3

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