Polarization phase-shifting Newton interferometer without errors caused by polarization crosstalk

被引：2

作者：

Trinh, Hung-Xuan ^{[1
]}

Lin, Shyh-Tsong ^{[1
]}

Chen, Liang-Chia ^{[2
]}

Yeh, Sheng-Lih ^{[3
]}

机构：

[1] Natl Taipei Univ Technol, Dept Electroopt Engn, Taipei 106, Taiwan

[2] Natl Taiwan Univ, Dept Mech Engn, Taipei, Taiwan

[3] Lunghwa Univ Sci & Technol, Dept Mech Engn, Guishan, Taiwan

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2014年 / 220卷

关键词：

Polarization; Phase-shifting; Newton interferometer; Polarization crosstalk; HOMODYNE INTERFEROMETER; NONLINEARITY;

D O I：

10.1016/j.sna.2014.10.007

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This research proposed a polarization phase-shifting Newton interferometer having two designs: phase compensation module and gap enlargement. Where the gap enlargement increases the optical path difference between the reference and object beams and the compensation module pulls the difference back. Based on these two designs, phase errors due to polarization crosstalk are removed. This paper first introduces the measurement theory and a setup for accomplishing the interferometer, it then exhibits the experimental results from applying this setup. The results not only validate the feasibility but also agree the performance of the proposed interferometer. (C) 2014 Elsevier B.V. All rights reserved.

引用

页码：243 / 248

页数：6

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