Study on MEMS Tunneling Effect Gyroscope

被引：0
|
作者：
Shi Yunbo [1 ]
Zhang Qiong [2 ]
Li Junhong [2 ]
Tong Xiaogang [2 ]
Ma Zongmin [2 ]
Liu Jun [2 ]
机构：
[1] N Univ China, Natl Key Lab Elect Measurement & Technol, Taiyuan 030051, Shanxi, Peoples R China
[2] North China Univ, Minist Educ, Key Lab Instrumentat Sci & Dynam Measurement, Taiyuan 030051, Peoples R China
来源：
ISIE: 2009 IEEE INTERNATIONAL SYMPOSIUM ON INDUSTRIAL ELECTRONICS | 2009年
基金：
美国国家科学基金会;
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A new structure of tunneling gyroscope which is high-accuracy and low-range was presented in this paper, as well as the structure and the operating principles of this gyroscope were analyzed. Besides, the simulations were made in this paper which is close to the principle. Then the structure was fabricated by mEms technological processes. And its tunneling effect was tested by HP4156C high precise semiconductor parameter test instrumentation, there is linear relationship between the square of drive voltage and the logarithm of tunneling current through the test results, so it shows that the tunneling current is validate.
引用
收藏
页码：926 / +
页数：2
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