Study on MEMS Tunneling Effect Gyroscope

被引：0
|
作者：
Shi Yunbo [1 ]
Zhang Qiong [2 ]
Li Junhong [2 ]
Tong Xiaogang [2 ]
Ma Zongmin [2 ]
Liu Jun [2 ]
机构：
[1] N Univ China, Natl Key Lab Elect Measurement & Technol, Taiyuan 030051, Shanxi, Peoples R China
[2] North China Univ, Minist Educ, Key Lab Instrumentat Sci & Dynam Measurement, Taiyuan 030051, Peoples R China
来源：
ISIE: 2009 IEEE INTERNATIONAL SYMPOSIUM ON INDUSTRIAL ELECTRONICS | 2009年
基金：
美国国家科学基金会;
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A new structure of tunneling gyroscope which is high-accuracy and low-range was presented in this paper, as well as the structure and the operating principles of this gyroscope were analyzed. Besides, the simulations were made in this paper which is close to the principle. Then the structure was fabricated by mEms technological processes. And its tunneling effect was tested by HP4156C high precise semiconductor parameter test instrumentation, there is linear relationship between the square of drive voltage and the logarithm of tunneling current through the test results, so it shows that the tunneling current is validate.
引用
收藏
页码：926 / +
页数：2
相关论文
共 50 条
  • [1] The research and design for a balancing-force MEMS gyroscope based on tunneling effect
    Shi, Yunbo
    Ma, Zongmin
    Meng, Meiyu
    Liu, Jun
    Luo, Yuanyuan
    ISTM/2007: 7TH INTERNATIONAL SYMPOSIUM ON TEST AND MEASUREMENT, VOLS 1-7, CONFERENCE PROCEEDINGS, 2007, : 4963 - 4967
  • [2] Modeling and Analysis of Temperature Effect on MEMS Gyroscope
    Wen, Ming
    Wang, Weihui
    Luo, Zhang
    Xu, Yong
    Wu, Xin
    Hou, Fei
    Liu, Sheng
    2014 IEEE 64TH ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC), 2014, : 2048 - 2052
  • [3] Effect of temperature on MEMS vibratory rate gyroscope
    Ferguson, Michael I.
    Keymeulen, Didier
    Peay, Chris
    Yee, Karl
    li, Daang Leon Li
    2005 IEEE AEROSPACE CONFERENCE, VOLS 1-4, 2005, : 2625 - 2630
  • [4] Study and Analysis of MEMS and NEMS based Gyroscope
    Thapliyal, Deepti
    Juyal, V. D.
    Singh, K. V.
    Humtsoe, L. T.
    Melong, T.
    PROCEEDINGS OF THE 2ND INTERNATIONAL CONFERENCE ON INVENTIVE SYSTEMS AND CONTROL (ICISC 2018), 2018, : 1320 - 1323
  • [5] Study of component noise of a digital MEMS gyroscope
    D'Alessandro, Antonino
    Vitale, Giovanni
    Scudero, Salvatore
    Greco, Luca
    2019 INTERNATIONAL SYMPOSIUM ON ADVANCED ELECTRICAL AND COMMUNICATION TECHNOLOGIES (ISAECT), 2019,
  • [6] Inclination Effect on the Periodic Response of a Symmetrical MEMS Gyroscope
    Zhang, Lijuan
    Zhang, Huabiao
    Li, Xinye
    Ji, Yunxiao
    MICROMACHINES, 2022, 13 (10)
  • [7] Study of A MEMS Gyroscope Sensing Unit Simulate and Process
    Liu, Yu
    Sun, Baisheng
    Yue, Ping
    Yan, Qinwen
    Zhang, Fuxue
    INTERNATIONAL CONFERENCE ON CONTROL, AUTOMATION AND SYSTEMS (ICCAS 2010), 2010, : 1205 - 1208
  • [8] A Comparative Study of Adaptive Control Approaches for MEMS Gyroscope
    Fei, J.
    Hua, M.
    Xue, Y.
    2010 IEEE INTERNATIONAL CONFERENCE ON CONTROL APPLICATIONS, 2010, : 1856 - 1861
  • [9] Design, Analysis and Simulation of a MEMS-Based Gyroscope with Differential Tunneling Magnetoresistance Sensing Structure
    Li, Cheng
    Yang, Bo
    Guo, Xin
    Chen, Xinru
    SENSORS, 2020, 20 (17) : 1 - 17
  • [10] Effect of carrier acceleration on response of electrostatically driven MEMS gyroscope
    Zhang L.
    Zhang H.
    Li X.
    Wang Y.
    Yu T.
    Zhendong yu Chongji/Journal of Vibration and Shock, 2021, 40 (05): : 55 - 62
12345