Spectroscopic analysis of ultrathin amorphous ZnO films grown by atomic layer deposition

Ultrathin amorphous Zinc Oxide films were prepared on glass substrates by homemade atomic layer deposition system using Diethyl Zinc and Deionized water as precursors and high pure Argon gas as purging gas. The substrate temperature was set as 125? and cycle number was varied. Different spectroscopic techniques were employed to unveil the structural and optical properties of films. The effect of quantum confinement on band gap energy values reduces with increase in thickness. Resonant Raman scattering was observed for all the samples when excited with laser wavelength of 325 nm. ? 2021 Elsevier Ltd. All rights reserved. Selection and peer-review under responsibility of the scientific committee of the International Conference on Materials, Processing & Characterization.