The Optical Dielectric Function in Monolithic BaxSr1-xTiO3 Films

被引：0

作者：

Bruzzese, D. ^{[1
]}

Fahnestock, K. J. ^{[1
]}

Schauer, C. L. ^{[1
]}

Spanier, J. E. ^{[1
]}

Weiss, C. V. ^{[2
]}

Alpay, S. P. ^{[2
]}

Cole, M. W. ^{[3
]}

Sbrockey, N. M. ^{[4
]}

Tompa, G. S. ^{[4
]}

机构：

[1] Drexel Univ, Dept Mat Sci & Engn, Philadelphia, PA 19104 USA

[2] Univ Connecticut, Mat Sci & Engn Program, Dept Chem Mat & Biomol Engn, Storrs, CT 06269 USA

[3] USA, Res Lab, Aberdeen Proving Ground, MD 20783 USA

[4] Struct Mat Ind Inc, Piscataway, NJ 08854 USA

来源：

INTEGRATED FERROELECTRICS | 2009年 / 111卷

关键词：

Ferroelectric thin films; phase shifters; BST; spectroscopic ellipsometry; optical dielectric function; TUNABLE DEVICE APPLICATIONS; (BA; SR)TIO3; THIN-FILMS; MOCVD;

D O I：

10.1080/10584580903586646

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present the results of characterization and analysis of the optical dielectric function of monolithic BaxSr1-xTiO3 films prepared by metal-organic solution deposition (MOSD). Lorentz Oscillator + Drude parameters and band gap for selected compositions are determined from variable-angle spectroscopic ellipsometry. Variation of the complex optical dielectric function is seen, and the results suggest that spectroscopic ellipsometry can be an effective means of both ex situ analysis and in situ monitoring of film composition during other BST and related film material growth processes.

引用

页码：27 / 36

页数：10

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