AlCrN layers were grown by gas source molecular beam epitaxy with varying amounts of Cr (up to similar to3 at. %) under a broad range of Cr cell temperatures and V/III ratio. Magnetic measurements performed in a superconducting quantum interference device magnetometer showed evidence of ferromagnetism up to 350 K in single phase material. Magnetization dependence on dopant cell temperature and V/III was used to optimize the growth conditions of the AlCrN layers. The single-phase material was highly insulating (similar to10(10) Omega cm), while the material containing second phases (predominantly Cr2N and AlxCry) was conducting with resistivity of order 1000 Omega cm. High resolution x-ray diffraction. rocking curves indicated high crystalline quality in the single phase material. (C) 2005 American Institute of Physics.