Direct printing of gratings on sol-gel layers

被引：25
作者：
Moreau, Y
Arguel, P
Coudray, P
Etienne, P
Porque, J
Signoret, P
机构：
[1] Univ Montpellier 2, Ctr Electron & Microoptoelectron Montpellier, F-34095 Montpellier 5, France
[2] CNR, Lab Analyse & Architecture Syst, F-31077 Toulouse, France
[3] Univ Montpellier 2, Lab Analyse Interface & Nanophys, Montpellier, France
[4] Univ Montpellier 2, Labs des Verres, Montpellier, France
来源：
OPTICAL ENGINEERING | 1998年 / 37卷 / 04期
关键词：
sol-gel process; integrated optics; low-cost fabrication;
D O I：
10.1117/1.601946
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
The sol-gel process is an interesting alternative for making glass integrated-optics components. Reasonable performance can be reached with low-cost fabrication. We show a one-step method for imprinting gratings on a thin layer made through the sol-gel process, thus enlarging the field of application in integrated optics to filters, out-of-plane connections, etc. The efficiency of the grating is studied through diffraction measures and computations. (C) 1998 Society of Photo-Optical Instrumentation Engineers.
引用
收藏
页码：1130 / 1135
页数：6
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