Initial stage of film growth of pulsed laser deposited YMnO3

被引：11

作者：

Ito, D ^{[1
]}

Fujimura, N ^{[1
]}

Ito, T ^{[1
]}

机构：

[1] Univ Osaka Prefecture, Grad Sch Engn, Sakai, Osaka 5998531, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2000年 / 39卷 / 9B期

关键词：

YMnO3; MFIS structure; initial stage; ozone gas; yttrium rich layer; orientation distribution; P-E characteristic;

D O I：

10.1143/JJAP.39.5525

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

To improve the polarization-electric field (P-E) characteristic of pulsed laser deposited YMnO3 film, the initial stage of the film growth was studied. We confirmed that an yttrium-rich layer with poor crystallinity was formed at the initial stage of film growth, and this resulted in the large orientation distribution of the films. Stoichiometric YMnO3 films without an yttrium-rich layer were successfully obtained by optimizing the laser power density, oxygen gas pressure, and use of ozone gas. Eventually, the P-E characteristic of the YMnO3 film was improved.

引用

页码：5525 / 5527

页数：3

共 8 条

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