Morphology and optical properties of thin CdTe films

被引：1

作者：

Podlipnov, V. V. ^{[1
,2
]}

Kolpakov, V. A. ^{[1
]}

机构：

[1] Samara Natl Res Univ, 34 Moskovskoe Schosse, Samara 443086, Russia

[2] Branch FSRC Crystallog & Photon RAS, Image Proc Syst Inst RAS, 151 Molodogvardeyskaya St, Samara 443001, Russia

来源：

OPTICAL TECHNOLOGIES FOR TELECOMMUNICATIONS 2016 | 2017年 / 10342卷

基金：

俄罗斯基础研究基金会;

关键词：

vacuum; thin films; cadmium telluride (CdTe); resistive dynamic evaporation; research; Raman spectrum; PHOTONIC CRYSTAL CAVITIES; DIFFRACTIVE MICRORELIEF; SUBSTRATE-TEMPERATURE; HYPERSPECTROMETER; SCATTERING; ELEMENTS; DESIGN; FABRICATION; EVAPORATION; SIMULATION;

D O I：

10.1117/12.2270758

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Experimental research in deposition of thin CdTe films was carried out using the resistive dynamic vacuum evaporation method. While forming thin CdTe films, temperature parameters of a substrate varied. Parameters of obtained CdTe films were investigated using Raman spectroscopy, scanning profilometry and scanning electron microscopy. The measured results showed high quality of thin CdTe films deposited on the substrate at temperature of 300 degrees C and 450 degrees C.

引用

页数：9

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