TiO2/TiN/TiO2 heat mirrors by laser ablation of single TiN target

被引：19
作者：
Kawasaki, H.
Ohshima, T.
Yagyu, Y.
Suda, Y.
Khartsev, S. I.
Grishin, A. M.
机构：
[1] Sasebo National College of Technology, Sasebo, Nagasaki 857-1193
[2] Department of Condensed Matter Physics, Royal Institute of Technology
来源：
PROCEEDINGS OF THE 17TH INTERNATIONAL VACUUM CONGRESS/13TH INTERNATIONAL CONFERENCE ON SURFACE SCIENCE/INTERNATIONAL CONFERENCE ON NANOSCIENCE AND TECHNOLOGY | 2008年 / 100卷
关键词：
D O I：
10.1088/1742-6596/100/1/012038
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Titanium oxide (TiO2) and titanium nitride (TiN) multilayered films grown by pulsed laser deposition (PLD) technique have been tested as a heat mirror, which have a high transmittance in the visible region and a high reflectance in the infrared. Three layer TiO2/TiN/TiO2 heat mirrors were grown on Corning glass substrates ablating single TiN target. Switching of TiO2-to-TiN layers composition was achieved by changing gas atmosphere (oxygen-to-nitrogen). Grown TiO2/TiN/TiO2 heat mirrors are highly transparent in visible (above 60% at 525nm), opaque in infrared (10% at 2600nm) and in the range from 400 nm to 2600 nm they possess almost the same properties as films prepared using two targets: TiO2 and TiN. XPS confirms similarity of chemical composition of multilayered TiO2/TiN films prepared by single TiN and two TiO2 and TiN targets techniques. Furthermore, multifunctional self cleaning properties of TiO2/TiN heat mirrors are expected through the precise control of the composition of the top TiO2 layer operating as a photocatalyst.
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页数：4
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