Bistability and hysteresis in inductively coupled plasmas

被引：7

作者：

Ostrikov, KN ^{[1
]}

Xu, S ^{[1
]}

Lee, S ^{[1
]}

机构：

[1] Nanyang Technol Univ, NIE, Plasma Proc Lab, Singapore 259756, Singapore

来源：

PHYSICA SCRIPTA | 2000年 / 62卷 / 2-3期

关键词：

D O I：

10.1238/Physica.Regular.062a00189

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

The transition between the two stable operation regimes (E and H discharge modes) in inductively coupled argon plasmas has been studied experimentally and theoretically. Analogy with other physical phenomena exhibiting hysteresis has been drawn. Analysis of power balance, electromagnetic field, plasma parameters, densities of the excited states, and optical emission spectra shows that the hysteresis may be due to nonlinearities associated with step-wise ionization through excited states of the argon atoms.

引用

页码：189 / 193

页数：5

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