Crystallization of BaTiO3 thin film at 140°C by metalorganic decomposition hydrothermal method using different precursors

被引：11

作者：

Wei, ZQ ^{[1
]}

Noda, M ^{[1
]}

Okuyama, M ^{[1
]}

机构：

[1] Osaka Univ, Grad Sch Engn Sci, Toyonaka, Osaka 5608531, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2002年 / 41卷 / 11B期

关键词：

hydrothermal; MOD; BaTiO3; TiO2; SrTiO3; precursor; gel film;

D O I：

10.1143/JJAP.41.6619

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

BaTiO3 thin films have been successfully crystallized by hydrothermal treatment of metalorganic decomposition-derived TiO2, BaTiO3 and SrTiO3 gel films in Ba(OH)2 aqueous solution at a low temperature of 140degreesC. BaTiO3 thin film obtained by hydrothermal treatment of TiO2 gel film shows (100) preferred orientation, whereas BaTiO3 thin films obtained by hydrothermal treatment of BaTiO3 and SrTiO3 gel films show (110) preferred orientation. Inductively coupled plasma spectroscopy shows that in BaTiO3 thin film obtained by hydrothermal treatment of TiO2 gel film, Ti is still rich in the films even after 300 min treatment, but the BaTiO3 thin films obtained from BaTiO3 and SrTiO3 gel film are almost stoichiometric. The BaTiO3 thin film obtained by hydrothermal treatment of BaTiO3 gel film shows ferroelectric hysteresis, while that obtained from TiO2 gel film shows paraelectricity.

引用

页码：6619 / 6623

页数：5

共 10 条

[1]

Dean J.A., 1979, LANGES HDB CHEM, P10

[2] SHORT-CIRCUIT DIFFUSION OF BA, SR, AND O DURING ATIO(3) (A=BA, SR) THIN-FILM GROWTH BY THE HYDROTHERMAL-ELECTROCHEMICAL METHOD [J].

KAJIYOSHI, K ;

TOMONO, K ;

HAMAJI, Y ;

KASANAMI, T ;

YOSHIMURA, M .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1995, 78 (06) :1521-1531

[3] Asymmetric rocking curve study of the crystal structure orientations for BaTiO3 thin films grown by pulsed laser deposition [J].

Li, CL ;

Cui, DF ;

Zhou, YL ;

Lu, HB ;

Chen, ZH ;

Zhang, DF ;

Wu, F .

APPLIED SURFACE SCIENCE, 1998, 136 (03) :173-177

[4] Water incorporation in BaTiO3 films grown under hydrothermal conditions [J].

Lisoni, JG ;

Piera, FJ ;

Sanchez, M ;

Soto, CF ;

Fuenzalida, VM .

APPLIED SURFACE SCIENCE, 1998, 134 (1-4) :225-228

[5] Crystal growth and optical property of GaN on silica glass by electron-cyclotron-resonance plasma-excited molecular beam epitaxy (ECR-MBE) [J].

Murata, N ;

Tochishita, W ;

Shimizu, Y ;

Araki, T ;

Nanishi, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1998, 37 (10B) :L1214-L1216

[6]

Sze S. M., 1981, PHYS SEMICONDUCTOR D, P403

[7] Low-temperature crystallization of metal organic decomposition BaTiO3 thin film by hydrothermal annealing [J].

Wei, ZQ ;

Xu, HP ;

Yamashita, K ;

Okuyama, M .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2000, 39 (7A) :4217-4219

[8] Preparation of Pb(Zr0.52TiO0.48)O3 thin films at low-temperature of less than 400°C by hydrothermal treatment following sol-gel deposition [J].

Wei, ZQ ;

Yamashita, K ;

Okuyama, M .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2001, 40 (9B) :5539-5542

[9]

XU H, 1990, TRANSDUCER, V199

[10] Preparation and ferroelectric properties of BaTiO3 thin films by atmospheric-pressure metalorganic chemical vapor deposition [J].

Zeng, JM ;

Wang, H ;

Wang, M ;

Shang, SX ;

Wang, Z ;

Lin, CL .

THIN SOLID FILMS, 1998, 322 (1-2) :104-107

← 1 →