Distributed reflector lasers with first-order vertical grating and second-order Bragg reflectors

被引：2

作者：

Kim, HC ^{[1
]}

Kanjo, H ^{[1
]}

Tamura, S ^{[1
]}

Arai, S ^{[1
]}

机构：

[1] Tokyo Inst Technol, Res Ctr Quantum Effect Elect, Meguro Ku, Tokyo 1528552, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2002年 / 41卷 / 12期

关键词：

distributed reflector laser; vertical grating; deep etching;

D O I：

10.1143/JJAP.41.7396

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Distributed reflector (DR) lasers consisting of a first-order vertical grating and second-order Bragg reflectors with lambda/4 gaps were realized by one-step epitaxy followed by electron beam lithography and CH4/H-2 reactive-ion etching. The sample with the cavity length of 460 mum, stripe width of 1.6 mum and grating depth of 0.1 mum on each lateral side exhibited a threshold current of 12 mA, a differential quantum efficiency of 18% from the cleaved front facet under pulsed condition and submode suppression ratio of 36 dB at a bias current of two times the threshold.

引用

页码：7396 / 7397

页数：2

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