Femtosecond laser-induced nanoperiodic structures and simultaneous crystallization in amorphous indium-tin-oxide thin films

被引：20

作者：

Cheng, C. W. ^{[1
]}

Lee, I. M. ^{[2
]}

Chen, J. S. ^{[2
,3
]}

机构：

[1] Natl Chiao Tung Univ, Dept Mech Engn, Hsinchu 30010, Taiwan

[2] Natl Chung Cheng Univ, Dept Mech Engn, Chiayi 621, Taiwan

[3] Natl Chung Hsing Univ, Dept Mech Engn, Taichung 402, Taiwan

来源：

APPLIED SURFACE SCIENCE | 2014年 / 316卷

关键词：

Femtosecond laser; Nanoperiodic structure; Crystallization; Indium-tin-oxide; FABRICATION; ABLATION; GLASS;

D O I：

10.1016/j.apsusc.2014.07.071

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Fabrication of crystalline indium-tin-oxide (c-ITO) nanogratings and smooth line patterns on amorphous ITO (a-ITO) thin films by femtosecond laser-induced structuring and simultaneous crystallization followed by chemical etching is demonstrated. Three types of c-ITO structures are obtained merely by controlling the laser pulse energy of a high-repetition rate femtosecond laser at wavelength 532 nm: nanogratings perpendicular to laser polarization direction with period of 130 perpendicular to 11 nm, smooth c-ITO line patterns as well as nanogratings parallel to laser polarization direction with period of 390 +/- 10 nm. Large area c-ITO patterns and nanograting structures are fabricated, which are expected to be used in optoelectronic and micro-electronic devices. (C) 2014 Elsevier B.V. All rights reserved.

引用

页码：9 / 14

页数：6

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