Interaction between ethanol cluster ion beam and silicon surface

被引：15
|
作者：
Ryuto, Hiromichi [1 ]
Ozaki, Ryosuke [1 ]
Mukai, Hiroshi [1 ]
Takaoka, Gikan H. [1 ]
机构：
[1] Kyoto Univ, Photon & Elect Sci & Engn Ctr, Nishikyo Ku, Kyoto 6158510, Japan
来源：
VACUUM | 2010年 / 84卷 / 12期
关键词：
Cluster ion beam; Sputtering; Ethanol; Radiation damage;
D O I：
10.1016/j.vacuum.2009.12.018
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The interaction between an ethanol cluster ion beam and a silicon surface was investigated. The sputtering depth of a silicon surface irradiated with an ethanol cluster ion beam increased with acceleration voltage. The number of disordered atoms on the silicon surface irradiated with an ethanol cluster ion beam initially showed a small dependence on retarding voltage and then a steep decrease with a further increase in retarding voltage. (C) 2010 Elsevier Ltd. All rights reserved.
引用
收藏
页码：1419 / 1422
页数：4
相关论文
共 50 条
  • [1] Surface reaction between water cluster ion and silicon substrate
    Ryuto, H.
    Ichihashi, G.
    Takeuchi, M.
    Takaoka, G. H.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2013, 315 : 227 - 230
  • [2] Interactions of ethanol cluster ion beams with silicon surfaces
    Takaoka, GH
    Noguchi, H
    Kawashita, M
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2006, 242 (1-2) : 417 - 420
  • [3] Irradiation effects of water cluster ion beam on PMMA surface
    Ryuto, Hiromichi
    Ichihashi, Gaku
    Takeuchi, Mitsuaki
    Takaoka, Gikan H.
    VACUUM, 2013, 87 : 119 - 122
  • [4] Sputtering of silicon nanopowders by an argon cluster ion beam
    Zeng, Xiaomei
    Pelenovich, Vasiliy
    Wang, Zhenguo
    Zuo, Wenbin
    Belykh, Sergey
    Tolstogouzov, Alexander
    Fu, Dejun
    Xiao, Xiangheng
    BEILSTEIN JOURNAL OF NANOTECHNOLOGY, 2019, 10 : 135 - 143
  • [5] Sputtering and defect production by focused gold cluster ion beam irradiation of silicon
    Dobeli, M
    Nebiker, PW
    Muhle, R
    Suter, M
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1997, 132 (04) : 571 - 577
  • [6] Surface ripples induced by gas cluster ion beam on copper surface at elevated temperatures
    Ieshkin, Alexei
    Kireev, Dmitriy
    Ozerova, Kseniya
    Senatulin, Boris
    MATERIALS LETTERS, 2020, 272
  • [7] Cluster ion beam irradiation at low energy and surface pattern formation
    Jimenez-Saez, J. C.
    Munoz, S.
    Palacios, P.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2025, 563
  • [8] Effect of argon cluster ion beam on fused silica surface morphology
    Korobeishchikov, N. G.
    Nikolaev, I. V.
    Roenko, M. A.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2019, 438 : 1 - 5
  • [9] Cluster ion beam processing
    Yamada, I
    SURFACE COATINGS FOR ADVANCED MATERIALS, 1997, 246 : 239 - 260
  • [10] Acetone cluster ion beam irradiation on solid surfaces
    Ryuto, H.
    Kakumoto, Y.
    Itozaki, S.
    Takeuchi, M.
    Takaoka, G. H.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2013, 315 : 231 - 233
12345