THREE-DOF CMOS-MEMS PROBES WITH EMBEDDED PIEZORESISTIVE SENSORS

被引：0

作者：

Liu, J. ^{[1
]}

Draghi, L. ^{[1
]}

Bain, J. A. ^{[1
]}

Schlesinger, T. E. ^{[1
]}

Fedder, G. K. ^{[1
]}

机构：

[1] Carnegie Mellon Univ, Pittsburgh, PA 15213 USA

来源：

MEMS 2010: 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2010年

关键词：

FORCE; MICROGRIPPER;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report on a new 3-DOF CMOS-MEMS electrothermal probe, featuring embedded piezoresistive sensors. These probes have the potential to be used independently for general 3-DOF nanoscale manipulation/manufacturing/scanning without external actuation and sensing. In this probe design, 3-DOF piezoresistive sensors are used to track probe actuation and applied force in all three directions, and thermal management such as dummy heater beams and metal-slotted thermal isolation structures are used to improve drive sensitivity.

引用

页码：284 / 287

页数：4