THREE-DOF CMOS-MEMS PROBES WITH EMBEDDED PIEZORESISTIVE SENSORS

被引:0
|
作者
Liu, J. [1 ]
Draghi, L. [1 ]
Bain, J. A. [1 ]
Schlesinger, T. E. [1 ]
Fedder, G. K. [1 ]
机构
[1] Carnegie Mellon Univ, Pittsburgh, PA 15213 USA
来源
MEMS 2010: 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2010年
关键词
FORCE; MICROGRIPPER;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report on a new 3-DOF CMOS-MEMS electrothermal probe, featuring embedded piezoresistive sensors. These probes have the potential to be used independently for general 3-DOF nanoscale manipulation/manufacturing/scanning without external actuation and sensing. In this probe design, 3-DOF piezoresistive sensors are used to track probe actuation and applied force in all three directions, and thermal management such as dummy heater beams and metal-slotted thermal isolation structures are used to improve drive sensitivity.
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页码:284 / 287
页数:4
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