Architecture of superthick diamond-like carbon films with excellent high temperature wear resistance

被引：57

作者：

Wang, Junjun ^{[1
,2
]}

Pu, Jibin ^{[1
]}

Zhang, Guangan ^{[1
]}

Wang, Liping ^{[1
]}

机构：

[1] Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China

[2] Univ Chinese Acad Sci, Beijing 100039, Peoples R China

来源：

TRIBOLOGY INTERNATIONAL | 2015年 / 81卷

基金：

中国国家自然科学基金;

关键词：

Diamond-like carbon film; High temperature; Tribological property; TRIBOLOGICAL BEHAVIOR; COATINGS; IMPLANTATION; STABILITY;

D O I：

10.1016/j.triboint.2014.08.017

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

A plasma-enhanced chemical vapor deposition system was used to deposit super thick diamond-like carbon (DLC)-based films ((Si-x-DLC/Si-y-DLC)(n)). The aim of this work is to investigate the properties of super thick films to verify that increasing the thickness of DLC films offers the possibility of improving their properties at high temperatures. The investigation revealed that superthick (Si-x-DLC/Si-y-DLC)(n) film exhibited excellent tribological property up to 500 C. One reason is that a thin layer that consists of nanocrystals SiC is formed on the top of wear track. Another is that the stress mostly concentrates near the top surface. (C) 2014 Elsevier Ltd. All rights reserved.

引用

页码：129 / 138

页数：10

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