Regional effects and mechanisms of nanoparticle removal from Si substrate by laser plasma shock waves

被引：18

作者：

Gu, Qiongqiong ^{[1
]}

Feng, Guoying ^{[1
]}

Zhou, Guorui ^{[2
]}

Han, Jinghua ^{[1
]}

Luo, Ju ^{[1
]}

Men, Jinliang ^{[1
]}

Jiang, Yue ^{[1
]}

机构：

[1] Sichuan Univ, Coll Elect & Informat Engn, Chengdu 610064, Sichuan, Peoples R China

[2] China Acad Engn Phys, Laser Fus Res Ctr, Mianyang 621900, Peoples R China

来源：

APPLIED SURFACE SCIENCE | 2018年 / 457卷

基金：

中国国家自然科学基金;

关键词：

Laser plasma shockwaves; Nanoparticle adhesion; Nanoparticle removal; Particle removal mechanisms; PARTICLE REMOVAL; CLEANING PROCESS; SILICON-WAFER; ALUMINUM; FRICTION; SURFACES; SIMULATION; BEHAVIOR;

D O I：

10.1016/j.apsusc.2018.06.234

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

We use laser-induced plasma shock waves to remove Al nanoparticles from a smooth silicon substrate. Our experimental results show that the removal mechanism varies for different substrate regions. We examine the factors influencing particle removal by evaluating the shock-wave spatial distribution and the removal mechanisms. Further, we evaluate the influence of the gap between the laser focus and substrate on the removal results. The effects of the laser focus and substrate particle sizes are also investigated, and the optimum removal conditions are obtained. Our study can aid in better understanding the mechanisms of particle removal from surfaces.

引用

页码：604 / 615

页数：12

共 41 条

[31] Influence of in-flight particle characteristics and substrate temperature on the formation mechanisms of hypereutectic Al-Si-Cu coatings prepared by supersonic atmospheric plasma spraying [J].

He, Peng-fei ;

Ma, Guo-zheng ;

Wang, Hai-dou ;

Tang, Ling ;

Liu, Ming ;

Bai, Yu ;

Wang, Yu ;

Tang, Jian-jiang ;

He, Dong-yu ;

Zhao, Hai-chao ;

Yu, Tian-yang .

JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY, 2021, 87 :216-233

[32] Laser wavelength effects on the charge state resolved ion energy distributions from laser-produced Sn plasma [J].

Burdt, Russell A. ;

Tao, Yezheng ;

Tillack, Mark S. ;

Yuspeh, Sam ;

Shaikh, Nek M. ;

Flaxer, Eli ;

Najmabadi, Farrokh .

JOURNAL OF APPLIED PHYSICS, 2010, 107 (04)

[33] Laser pulse desorption under scanning tunneling microscope tip-Cl removal from single site on Si(100) [J].

Dohnalek, Z ;

Lyubinetsky, I ;

Yates, JT .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1997, 15 (03) :1488-1492

[34] Selective removal of 10-40-nm particles from silicon wafers using laser-induced plasma shockwaves [J].

Peri, M. D. Murthy ;

Devarapalli, Vamsi K. ;

Cetinkaya, Cetin .

JOURNAL OF ADHESION SCIENCE AND TECHNOLOGY, 2007, 21 (3-4) :331-337

[35] Non-contact removal of 60-nm latex particles from silicon wafers with laser-induced plasma [J].

Varghese, I ;

Cetinkaya, C .

JOURNAL OF ADHESION SCIENCE AND TECHNOLOGY, 2004, 18 (07) :795-806

[36] Numerical investigation of nanosecond laser induced plasma and shock wave dynamics from air using 2D hydrodynamic code [J].

Shiva, S. Sai ;

Leela, Ch. ;

Kiran, P. Prem ;

Sijoy, C. D. ;

Ikkurthi, V. R. ;

Chaturvedi, S. .

PHYSICS OF PLASMAS, 2017, 24 (08)

[37] Precision micro-particle removal from through-holes via laser-induced plasma shockwaves in additive manufacturing [J].

Sultan, Tipu ;

Rozin, Enamul Hassan ;

Xu, Xiaochi ;

Chakrobarty, Avijit ;

Cetinkaya, Cetin .

JOURNAL OF MANUFACTURING PROCESSES, 2024, 131 :412-426

[38] Effects of laser shock processing on 00Cr12 mechanical properties in the temperature range from 25 °C to 600 °C [J].

Ren, X. D. ;

Jiang, D. W. ;

Zhang, Y. K. ;

Zhang, T. ;

Guan, H. B. ;

Qian, X. M. .

APPLIED SURFACE SCIENCE, 2010, 257 (05) :1712-1715

[39] Combined effects of double pulses and magnetic field on emission enhancement of laser-induced breakdown spectroscopy from aluminum plasma [J].

Hussain, Atif ;

Gao, Xun ;

Hao, Zuoqiang ;

Lin, Jingquan .

OPTIK, 2016, 127 (20) :10024-10030

[40] Combined effects of pre-pulsing and target geometry on efficient EUV production from laser produced plasma experiments and modeling [J].

Hassanein, A. ;

Sizyuk, T. ;

Sizyuk, V. ;

Harilal, S. S. .

EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY II, 2011, 7969

← 1 2 3 4 5 →