Properties of ZnO/Cu/ZnO multilayer films deposited by simultaneous RF and DC magnetron sputtering at different substrate temperatures

被引：31
|
作者：
Sahu, D. R. [1 ]
Huang, Jow-Lay [1 ]
机构：
[1] Natl Cheng Kung Univ, Dept Mat Sci & Engn, Tainan 701, Taiwan
来源：
MICROELECTRONICS JOURNAL | 2007年 / 38卷 / 03期
关键词：
TCO; multilayer; sputtering; electrical and optical properties;
D O I：
10.1016/j.mejo.2007.01.012
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
ZnO/Cu/ZnO transparent conductive multilayer films are prepared by simultaneous RF sputtering of ZnO and DC sputtering of Cu. The properties of the multilayer films are studied at different substrate temperatures. Sheet resistance of the multilayer film decreased initially with increase of substrate temperature and increased further with increase of substrate temperature beyond 100 degrees C. However, transmittance of the multilayer film increased with increase of substrate temperature. Good transparent conductive film of sheet resistance 9.3 ohm/sq and transmittance of 85% was found at a substrate temperature of 100 degrees C. The performance of the multilayer film was evaluated using a figure of merit. The observed property of the multilayer film is suitable for the application of transparent conductive electrodes. (C) 2007 Elsevier Ltd. All rights reserved.
引用
收藏
页码：299 / 303
页数：5
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