Fabrication and characterization of silica anti-reflective films with phosphoric acid template

被引:9
作者
Xie, Qiang [1 ]
Li, Haibin [1 ]
机构
[1] Shanghai Jiao Tong Univ, Sch Mech Engn, Inst Fuel Cell, Shanghai 200240, Peoples R China
关键词
Antireflective film; Solar energy materials; Sol-gel preparation; Silica; H3PO4; Porous materials;
D O I
10.1016/j.matlet.2014.09.111
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this work, the feasibility is investigated and confirmed that H3PO4 is used as pore-forming agent in silica antireflective film. The films are prepared by sol-gel method and spinning-coating technique and studied by field-emission scanning electron microscopy (FE-SEM), visible spectroscopy and ellipsometer. The impact of H3PO4 concentration on transmittance is also examined. Transmittance spectra show that silica films feature a marked increase of substrate transmittance almost at all measured wavelengths (325-1000 nm) owing to the addition of H3PO4. With the decrease of H3PO4 concentration, films transmittance will rise first and then decrease slightly. And with an increase of 4.1%, a maximum light transmittance of 95.01% is obtained, which is comparable to some other antireflective films using organic templates. (C) 2014 Elsevier B.V. All rights reserved.
引用
收藏
页码:67 / 70
页数:4
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