Contribution of alloy clustering to limiting the two-dimensional electron gas mobility in AlGaN/GaN and InAlN/GaN heterostructures: Theory and experiment

被引:32
作者
Ahmadi, Elaheh [1 ]
Chalabi, Hamidreza [2 ]
Kaun, Stephen W. [3 ]
Shivaraman, Ravi [3 ]
Speck, James S. [3 ]
Mishra, Umesh K. [1 ]
机构
[1] Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
[2] Stanford Univ, Geballe Lab Adv Mat, Stanford, CA 94305 USA
[3] Univ Calif Santa Barbara, Dept Mat, Santa Barbara, CA 93106 USA
关键词
SCATTERING; ROUGHNESS;
D O I
10.1063/1.4896967
中图分类号
O59 [应用物理学];
学科分类号
摘要
The influence of alloy clustering on fluctuations in the ground state energy of the two-dimensional electron gas (2DEG) in AlGaN/GaN and InAlN/GaN heterostructures is studied. We show that because of these fluctuations, alloy clustering degrades the mobility even when the 2DEG wavefunction does not penetrate the alloy barrier unlike alloy disorder scattering. A comparison between the results obtained for AlGaN/GaN and InAlN/GaN heterostructures shows that alloy clustering limits the 2DEG mobility to a greater degree in InAlN/GaN heterostructures. Our study also reveals that the inclusion of an AlN interlayer increases the limiting mobility from alloy clustering. Moreover, Atom probe tomography is used to demonstrate the random nature of the fluctuations in the alloy composition. (C) 2014 AIP Publishing LLC.
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页数:6
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