Effect of sputtering power on the methane sensing properties of nanostructured cadmium oxide films

被引：36
作者：
Dhivya, P. [1 ,2 ]
Prasad, Arun K. [3 ]
Sridharan, M. [1 ,2 ]
机构：
[1] SASTRA Univ, Funct Nanomat & Devices Lab, Ctr Nanotechnol & Adv Biomat, Thanjavur 613401, India
[2] SASTRA Univ, Sch Elect & Elect Engn, Thanjavur 613401, India
[3] Indira Gandhi Ctr Atom Res, Surface & Nanosci Div, Mat Sci Grp, Kalpakkam 603102, Tamil Nadu, India
来源：
JOURNAL OF ALLOYS AND COMPOUNDS | 2015年 / 620卷
关键词：
Cadmium oxide; Nanostructured materials; Thin films; X-ray diffraction; Methane sensing; SNO2 GAS SENSORS; THIN-FILMS; ELECTRICAL-PROPERTIES; OPTICAL-PROPERTIES; RF POWER; TEMPERATURE; SENSITIVITY; PRESSURE;
D O I：
10.1016/j.jallcom.2014.09.107
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Effect of sputtering power on properties of CdO thin film deposited on glass substrate at room temperature by reactive dc magnetron sputtering has been studied. Correlation between the crystal structure, morphological and optical properties were systematically investigated. It has been found that sputtering power increases the crystallographic orientation of the film and at highest sputtering power, deterioration in crystallite growth occurs due to the excessively energetic sputtered particles. The microstructure of the films changes from nano flakes to self-assembled nano-pillar like structure with increasing sputtering power. All the films were highly transparent. The resistivity of the film decreased with increasing sputtering power and at 50 W, it increased to 16 x 10 (2) Omega cm due to higher ion bombardment effects. The methane sensing properties has been demonstrated with the fabricated CdO based sensor at a relatively low operating temperature. (C) 2014 Elsevier B.V. All rights reserved.
引用
收藏
页码：109 / 115
页数：7
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