Microsystem technology: Between research and industrial application

被引：15

作者：

Abraham, M ^{[1
]}

Ehrfeld, W ^{[1
]}

Hessel, V ^{[1
]}

Kamper, KP ^{[1
]}

Lacher, M ^{[1
]}

Picard, A ^{[1
]}

机构：

[1] Inst Microtechnol Mainz GMBH, D-55129 Mainz, Germany

来源：

MICROELECTRONIC ENGINEERING | 1998年 / 42卷

关键词：

D O I：

10.1016/S0167-9317(98)00011-2

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Microsystemtechnology is defined in comparison to microelectronics. The development of dedicated microfabrication technologies is summarized and recent developments of microsystems for typical application fields are shown. Specific problems of industrial application are discussed.

引用

页码：47 / 52

页数：6

共 7 条

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