X-ray photoelectron spectroscopy investigation of oxidation states in molybdenum thin films for Cu(InGa)Se2 applications

被引：5

作者：

Kang, Y. C. ^{[2
]}

Khanal, R.

Park, J. Y. ^{[2
]}

Ramsier, R. D. ^{[1
,4
]}

Khatri, H. ^{[3
]}

Marsillac, S. ^{[3
]}

机构：

[1] Univ Akron, Dept Phys, Dept Chem, Akron, OH 44325 USA

[2] Pukyong Natl Univ, Dept Chem, Pusan 608737, South Korea

[3] Univ Toledo, Dept Phys & Astron, Wright Ctr Photovolta Innovat & Commercializat, Toledo, OH 43606 USA

[4] Univ Akron, Off Provost, Akron, OH 44325 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2010年 / 28卷 / 03期

关键词：

metallic thin films; molybdenum; oxidation; sputter deposition; surface composition; X-ray photoelectron spectra; SOLAR-CELLS; BACK CONTACT; MO; XPS; SURFACE; OXIDES;

D O I：

10.1116/1.3425634

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Sputter deposited Mo thin films on soda-lime glass are studied by x-ray photoelectron spectroscopy. It is found that the proportion of metallic Mo at the surface decreases and the number of Mo6+ species increases as the Ar gas pressure used for sputtering is increased. Sodium, diffusing during deposition from the substrate, is also detected on the surface of the Mo thin films. The implications for optimizing Mo thin films for Cu(InGa)Se-2 applications are discussed. (C) 2010 American Vacuum Society. [DOI: 10.1116/1.3425634]

引用

页码：545 / 548

页数：4

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