Microstructure and properties of sol-gel derived (La,Sr)CoO3 thin film with compositional fluctuation La/Sr ratio

被引：4
|
作者：
Lu, W [1 ]
Zheng, P [1 ]
Meng, ZY [1 ]
Wu, WB [1 ]
机构：
[1] Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200072, Peoples R China
来源：
FIFTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS | 2004年 / 5774卷
关键词：
LSCO thin film; La/Sr ratio; sol-gel; resistivity;
D O I：
10.1117/12.607621
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Thin films of Lanthanum strontium cobalite [(La1-xSrx)CoO3, LSCO] were directly spin-coated onto SiO2/Si (100) substrates with compositional fluctuation La/Sr ratio, followed by rapid thermal annealing (RTA). The effects of different La/Sr ratios on the microstructure, surface morphology and electrical properties of the films were examined by X-ray diffraction (XRD), scanning electrical microscopy (SEM) and four probe measurements, respectively. The results indicate that the thin film displays a structure transform from rhombohedral phase to cubic phase around x=0.5, and that the resistivity of the thin film decreases with the increase of La/Sr ratio at the first, then increase slightly. A minimum value of resistivity of LSCO appears at x=0.5. In addition, the effect of the annealing temperature on the electrical properties of La0.5Sr0.5CoO3 films is discussed.
引用
收藏
页码：200 / 203
页数：4
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