Size-dependent dynamic modeling and vibration analysis of MEMS/NEMS-based nanomechanical beam based on the nonlocal elasticity theory

Accurate modeling and analysis of micro-/nanoelectromechanical systems (MEMS/NEMS) has an immense contribution in identification and improvement of the performance of such systems. This article investigates a nonclassical formulation for dynamicmodeling and vibration analysis of a piezo-actuatedmicrocantilever considering the Euler-Bernoulli beam model. Regarding the size effects in micro- to nanoscales, the size-dependent nonlocal continuum theory is employed to derive dynamic equations of the nonclassical microbeam taking into account the beam discontinuities. The nonlocal formulation of the beam and piezoelectric actuator is taken into consideration. Furthermore, the size effects on the resonant vibration characteristics of the beam are studied and some results are obtained. The results illustrate the size-dependent behavior of the beam particularly at higher resonant modes of vibrations. Also, it is indicated that the nonlocality and piezoelectric characteristics have a significant influence on the resonance behavior of the beam. However, this effect is more significant at higher resonant modes of vibrations.