Fabrication of ferroelectric Bi4Ti3O12 thin films and micropatterns by means of chemical solution decomposition and electron beam irradiation

Fabrication of ferroelectric Bi4Ti3O12 thin films were carried out by chemical solution decomposition process. Bismuth and titanium octylates were used as starting materials. Precursor solutions were prepared by mixing the octylates with Bi:Ti molar ratio of 5.2:3.0. The films were crystallized into single-phase Bi4Ti3O12 with c-axis orientation by heat treatment at 800 degrees C for 30 min in air. The resultant film with a thickness of 400 nm consisted of large platelike crystals and exhibited ferroelectric properties; the remanent polarization of 0.4 mu C/cm(2) and the coercive field of 20 kV/cm. Fabrication of ferroelectric Bi4Ti3O12 micropatterns were also carried out by electron-beam-induced patterning process using liquid sources. The fine Bi4Ti3O12 micropatterns with a linewidth of 0.3 mu m were obtained. To promote crystal growth, heat treatment in O-2 gas with a pressure of 0.3 MPa was carried out. Resultant micropatterns were, however, polycrystals consisted of small grains.