Multiphonon ionization of deep centers in amorphous silicon nitride: Experiment and numerical simulations

被引:16
作者
Nasyrov, KA [1 ]
Novikov, YN
Gritsenko, VA
Yoon, SY
Kim, CW
机构
[1] Russian Acad Sci, Inst Automat & Electrometry, Siberian Div, Novosibirsk 630090, Russia
[2] Russian Acad Sci, Inst Semicond Phys, Siberian Div, Novosibirsk 630090, Russia
[3] Samsung Adv Inst Technol, Suwon 440600, South Korea
关键词
D O I
10.1134/1.1581966
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
The conductivity of amorphous silicon nitride has been studied experimentally in a wide range of electric fields and temperatures. The experimental results are in a quantitative agreement with the theory of multiphonon ionization of deep centers for the bipolar model of conductivity. The best agreement between experiment and the calculation has been obtained for the same parameters of deep electron and hole centers. (C) 2003 MAIK "Nauka/Interperiodica".
引用
收藏
页码:385 / 388
页数:4
相关论文
共 19 条
[1]  
[Anonymous], 1997, NONRADIATIVE RECOMBI
[2]   Transient conduction in multidielectric silicon-oxide-nitride-oxide semiconductor structures [J].
Bachhofer, H ;
Reisinger, H ;
Bertagnolli, E ;
von Philipsborn, H .
JOURNAL OF APPLIED PHYSICS, 2001, 89 (05) :2791-2800
[3]  
Frenkel' Ya. I., 1938, Zh. Eksp. Teor. Fiz, V8, P1292
[4]  
GADIYAK GV, 1985, MIKROELEKTRONIKA, V14, P512
[5]   Deep impurity-center ionization by far-infrared radiation [J].
Ganichev, SD ;
Prettl, W ;
Yassievich, IN .
PHYSICS OF THE SOLID STATE, 1997, 39 (11) :1703-1726
[6]  
Gritsenko V. A., 1976, Soviet Physics - Technical Physics, V21, P1263
[7]  
Gritsenko V. A., 1986, Soviet Physics - Solid State, V28, P1829
[8]  
Gritsenko V. A., 1993, ATOMIC ELECT STRUCTU
[9]  
Gritsenko V.A, 1987, MICROELECTRONICS SOV, V16, P42
[10]   UNSTEADY SILICON-NITRIDE CONDUCTIVITY IN HIGH ELECTRIC-FIELDS [J].
GRITSENKO, VA ;
MEERSON, EE ;
SINITSA, SP .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1978, 48 (01) :31-37