Design and fabrication of MEMS-controlled probes for studying the nano-interface under in situ TEM observation

被引：21

作者：

Ishida, T. ^{[1
]}

Nakajima, Y. ^{[1
]}

Kakushima, K. ^{[2
]}

Mita, M. ^{[3
]}

Toshiyoshi, H. ^{[1
]}

Fujita, H. ^{[1
]}

机构：

[1] Univ Tokyo, Inst Ind Sci, Meguro Ku, Tokyo 1538505, Japan

[2] Tokyo Inst Technol, Dept Elect & Appl Phys, Kanagawa 2268502, Japan

[3] Japan Aerosp Explorat Agcy, Inst Space & Astronaut Sci, Sagamihara, Kanagawa 2298510, Japan

来源：

JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2010年 / 20卷 / 07期

基金：

日本学术振兴会;

关键词：

ATOMIC-FORCE MICROSCOPY; STRESS; CONDUCTANCE;

D O I：

10.1088/0960-1317/20/7/075011

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Basic studies of nanometer scale phenomena, such as tribology, fusion bonding and deformation, are important for a MEMS/NEMS device. To better understand these nanometer scale phenomena, the combination of MEMS and transmission electron microscopy (TEM) setup is an invaluable tool. This combination allows for the direct observation of a deformation process at the nano-scale when a MEMS for the investigation of a nano-interface (MINI) device with sharp opposing tips is placed under a TEM. This paper describes the design and fabrication of a MINI that can perform an in situ experiment under TEM observation. We designed the MINI to minimize the misalignment of the opposing tips in order to provide adequate observation possibilities of the nanocontacts. In addition, we developed processes for the fabrication of a MINI and characterized it inside the TEM. Furthermore, silicon-silicon, gold-gold and silicon-gold opposing tips were designed and fabricated for experiments of the nano-interface of homogeneous and heterogeneous material. The MEMS tips were used to show an approach-contact-retraction-fracture cycle of a gold nanocontact under real-time TEM observation.

引用

页数：8

共 26 条

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