A multi-sensor biological monitoring module built up in LTCC-technology

被引：37

作者：

Smetana, Walter

Balluch, Bruno

Stangl, Guenther

Gaubitzer, Erwin

Edetsberger, Michael

Koehler, Gottfried

机构：

[1] Vienna Univ Technol, Inst Sensor & Actuator Syst, A-1040 Vienna, Austria

[2] Univ Vienna, Dept Biomol Struct Chem, Max F Perutz Labs, A-1030 Vienna, Austria

来源：

MICROELECTRONIC ENGINEERING | 2007年 / 84卷 / 5-8期

关键词：

LTCC-technology; biological monitoring module; biocompatibility; laser micromachining; microfluidics;

D O I：

10.1016/j.mee.2007.01.155

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Low temperature co-fired ceramic (LTCC) technology was originally developed for the realization of multilayer circuits of high reliability. It was recognized that LTCC-technology is a valuable development in thick film technology which launches new application areas as it becomes evident that complex three-dimensional structures can be easily realized. Aspects of the realization of a sophisticated biological monitoring module comprising a three-dimensional network of channels and cavities is demonstrated. (c) 2007 Elsevier B.V. All rights reserved.

引用

页码：1240 / 1243

页数：4

共 4 条

[1] LTCC microfluidic system [J].