H2 molecules in c-Si after hydrogen plasma treatment

被引：50

作者：

Leitch, AWR ^{[1
]}

Alex, V ^{[1
]}

Weber, J ^{[1
]}

机构：

[1] Max Planck Inst Festkorperforsch, D-70569 Stuttgart, Germany

来源：

SOLID STATE COMMUNICATIONS | 1998年 / 105卷 / 04期

关键词：

semiconductors; impurities in semiconductors;

D O I：

10.1016/S0038-1098(97)10107-7

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

We report on a Raman spectroscopy study of H-2 molecules in crystalline n- and p-type Si, after treatment in a hydrogen plasma. It is found that the annealing characteristics of the H-2 molecule in Si show similar behaviour to that of the hydrogen-induced platelets formed during plasma treatment. The results strongly suggest that the H-2 molecules are located within the voids created by the platelets. (C) 1997 Elsevier Science Ltd.

引用

页码：215 / 219

页数：5

共 15 条

[1] HYDROGEN EFFUSION - A PROBE FOR SURFACE DESORPTION AND DIFFUSION [J].

BEYER, W .

PHYSICA B, 1991, 170 (1-4) :105-114

[2] RAMAN SPECTRA OF LIQUID AND SOLID H2, D2, AND HD AT HIGH RESOLUTION [J].

BHATNAGAR, SS ;

WELSH, HL ;

ALLIN, EJ .

CANADIAN JOURNAL OF PHYSICS, 1962, 40 (01) :9-&

[3] ELECTRONIC-PROPERTIES OF HYDROGEN-DERIVED COMPLEXES IN SILICON [J].

CHADI, DJ ;

PARK, CH .

PHYSICAL REVIEW B, 1995, 52 (12) :8877-8880

[4] ATOMIC AND MOLECULAR-HYDROGEN IN THE SI LATTICE [J].

CORBETT, JW ;

SAHU, SN ;

SHI, TS ;

SNYDER, LC .

PHYSICS LETTERS A, 1983, 93 (06) :303-304

[5] HYDROGEN-RELATED DEFECTS IN CRYSTALLINE SEMICONDUCTORS - A THEORISTS PERSPECTIVE [J].

ESTREICHER, SK .

MATERIALS SCIENCE & ENGINEERING R-REPORTS, 1995, 14 (7-8) :319-412

[6] Formation of hydrogen molecules in n-type silicon [J].

Fukata, N ;

Sasaki, S ;

Murakami, K ;

Ishioka, K ;

Kitajima, M ;

Fujimura, S ;

Kikuchi, J .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1996, 35 (8B) :L1069-L1071

[7] HYDROGEN-INDUCED PLATELETS IN SILICON - INFRARED-ABSORPTION AND RAMAN-SCATTERING [J].

HEYMAN, JN ;

AGER, JW ;

HALLER, EE ;

JOHNSON, NM ;

WALKER, J ;

DOLAND, CM .

PHYSICAL REVIEW B, 1992, 45 (23) :13363-13366

[8] Hydrogen molecules in crystalline silicon treated with atomic hydrogen [J].

Murakami, K ;

Fukata, N ;

Sasaki, S ;

Ishioka, K ;

Kitajima, M ;

Fujimura, S ;

Kikuchi, J ;

Haneda, H .

PHYSICAL REVIEW LETTERS, 1996, 77 (15) :3161-3164

[9]

MURAKAMI K, 1977, MATER RES SOC S P, V442, P269

[10] HYDROGEN-INDUCED PLATELETS IN SILICON STUDIED BY TRANSMISSION ELECTRON-MICROSCOPY [J].

MUTO, S ;

TAKEDA, S ;

HIRATA, M .

PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1995, 72 (04) :1057-1074

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