Numerical simulation for air flow in the mini-environment and SMIF enclosure

被引：6
|
作者：
Shiu, HR [1 ]
Huang, HY
Chen, SL
Ke, MT
机构：
[1] Natl Taiwan Univ, Inst Engn Mech, Taipei, Taiwan
[2] Natl Taipei Univ Technol, Dept Air Conditioning & Refrigerat Engn, Taipei, Taiwan
来源：
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING | 2003年 / 16卷 / 01期
关键词：
air cleanliness; air flow field; mmi-environment; SMIF enclosure;
D O I：
10.1109/TSM.2002.807737
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The application of mini-environment and standard mechanical interface (SMIF) enclosure in the clean room can efficiently reduce airborne particles and isolate the personnel from the product The purpose of this article is to reduce the recirculation zone and to maintain the positive pressure from the analysis results of the airflow field and pressure distribution of SMIF enclosure and mini-euvironment. The simulation code CFX will be used to study the flow field of air movement corresponding to the associated design parameters. The results show that proper drilling holes or slots can reduce the circulation zones of SMIF enclosure. The positive pressure of SMIF enclosure is mainly affected by inlet air flux, area of outlets, and leakage area. The calculated results can provide the design rules for SMIF Robot inside the SMIF enclosure and reduce the particle accumulation during robot moving.
引用
收藏
页码：60 / 67
页数：8
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