Investigation of the cluster ion formation process for inorganic compounds in static SIMS

被引:10
作者
Aubriet, F [1 ]
Poleunis, C [1 ]
Bertrand, P [1 ]
机构
[1] Univ Catholique Louvain, Unite Physico Chim & Phys Mat, B-1348 Louvain, Belgium
关键词
ToF-SIMS; transition metal oxides; iron chromite; lead titanate; oxide mixtures;
D O I
10.1016/S0169-4332(02)00711-0
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Binary and ternary oxides including iron, chromium, titanium and lead were investigated by static SIMS. The numerous metal-oxygen ions obtained in both ion detection mode after 15 keV(69)Ga(+) bombardment have been analyzed by time-of-flight mass spectrometry. The obtained fingerprints allow the unambiguous identification of the studied oxides. The comparison between the results obtained in the study of FeCr2O4 and PbTiO3 ternary oxides and the FeO-Cr2O3 and PbO-TiO2 stoichiometric mixtures allow us to consider that recombination in gas phase did not occur between the sputtered species. The direct ejection of species followed by uni-molecular dissociation may well account for the obtained results. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:114 / 117
页数:4
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