High power applications of RF-MEMS

被引：1

作者：

Blondy, P. ^{[1
]}

Palego, C. ^{[1
]}

Pothier, A. ^{[1
]}

Crunteanu, A.

Gasseling, T.

Champeaux, C.

Catherinot, A.

Tristant, P.

机构：

[1] Univ Limoges, UMR CNRS 6172, XLIM, F-87065 Limoges, France

来源：

2007 TOPICAL MEETING ON SILICON MONOLITHIC INTEGRATED CIRCUITS IN RF SYSTEMS, DIGEST OF PAPERS | 2007年

关键词：

RF-MEMS; reliability; high power microwave signals; phase shifters; SWITCHES;

D O I：

10.1109/SMIC.2007.322785

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents recent results on the development of high power MEMS switched varactors. Design methodology as well as fabrication and measurement results are presented. The MEMS varactors are made of a thick metal gold cantilever, with a reduced contact area, that allows to control high power microwave signals. Operation up to 5 Watts CW is demonstrated, with good reliability. First results on applications to phase shifters is presented.

引用

页码：166 / 168

页数：3