Microcalorimetry of dust particles in a radio-frequency plasma

被引:86
作者
Swinkels, GHPM
Kersten, H
Deutsch, H
Kroesen, GMW
机构
[1] Eindhoven Univ Technol, Dept Phys, NL-5600 MB Eindhoven, Netherlands
[2] Univ Greifswald, Dept Phys, D-17487 Greifswald, Germany
关键词
D O I
10.1063/1.1302993
中图分类号
O59 [应用物理学];
学科分类号
摘要
The internal temperature of rhodamine B-dyed dust particles (2r(p)=1.2 mu m) immersed in radio-frequency (rf) plasmas has been measured for various plasma conditions. For this purpose, the dye has been excited with an argon-ion laser and the fluorescent emission of the particles has been recorded with an optical multichannel analyzer system. The temperature has been determined after comparison with calibration curves. In argon, the particle temperature increases with rf power and is independent of pressure. In oxygen, an increase with rf power is observed, too. However, the energy flux towards the particles includes also heating by atom recombination (association) and exothermic combustion reactions. These temperature measurements have been compared with calculations based on the thermal balance, where measurements of gas temperature, electron density, and electron temperature have been used. A good agreement between theory and experiment has been found. (C) 2000 American Institute of Physics. [S0021- 8979(00)03612-4].
引用
收藏
页码:1747 / 1755
页数:9
相关论文
共 30 条
[1]   PROBE THEORY - THE ORBITAL MOTION APPROACH [J].
ALLEN, JE .
PHYSICA SCRIPTA, 1992, 45 (05) :497-503
[2]   DUSTY PLASMA STUDIES IN THE GASEOUS ELECTRONICS CONFERENCE REFERENCE CELL [J].
ANDERSON, HM ;
RADOVANOV, SB .
JOURNAL OF RESEARCH OF THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY, 1995, 100 (04) :449-462
[3]   TRANSITION BETWEEN DIFFERENT REGIMES OF RF GLOW-DISCHARGES [J].
BELENGUER, P ;
BOEUF, JP .
PHYSICAL REVIEW A, 1990, 41 (08) :4447-4459
[4]   Dual emission laser induced fluorescence for direct planar scalar behavior measurements [J].
Coppeta, J ;
Rogers, C .
EXPERIMENTS IN FLUIDS, 1998, 25 (01) :1-15
[5]   PARTICULATE TEMPERATURE IN RADIO-FREQUENCY GLOW-DISCHARGES [J].
DAUGHERTY, JE ;
GRAVES, DB .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1993, 11 (04) :1126-1131
[6]   ELECTRON AND METASTABLE DENSITIES IN PARALLEL-PLATE RADIOFREQUENCY DISCHARGES [J].
GREENBERG, KE ;
HEBNER, GA .
JOURNAL OF APPLIED PHYSICS, 1993, 73 (12) :8126-8133
[7]  
Guilbault G.G., 1973, Practical Fluorescence: Theory, Methods and Techniques
[8]   THE GASEOUS ELECTRONICS CONFERENCE RADIOFREQUENCY REFERENCE CELL - A DEFINED PARALLEL-PLATE RADIOFREQUENCY SYSTEM FOR EXPERIMENTAL AND THEORETICAL-STUDIES OF PLASMA-PROCESSING DISCHARGES [J].
HARGIS, PJ ;
GREENBERG, KE ;
MILLER, PA ;
GERARDO, JB ;
TORCZYNSKI, JR ;
RILEY, ME ;
HEBNER, GA ;
ROBERTS, JR ;
OLTHOFF, JK ;
WHETSTONE, JR ;
VANBRUNT, RJ ;
SOBOLEWSKI, MA ;
ANDERSON, HM ;
SPLICHAL, MP ;
MOCK, JL ;
BLETZINGER, P ;
GARSCADDEN, A ;
GOTTSCHO, RA ;
SELWYN, G ;
DALVIE, M ;
HEIDENREICH, JE ;
BUTTERBAUGH, JW ;
BRAKE, ML ;
PASSOW, ML ;
PENDER, J ;
LUJAN, A ;
ELTA, ME ;
GRAVES, DB ;
SAWIN, HH ;
KUSHNER, MJ ;
VERDEYEN, JT ;
HORWATH, R ;
TURNER, TR .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (01) :140-154
[9]   Spatially resolved, excited state densities and neutral and ion temperatures in inductively coupled argon plasmas [J].
Hebner, GA .
JOURNAL OF APPLIED PHYSICS, 1996, 80 (05) :2624-2636
[10]   Atomic structure of amorphous nanosized silicon powders upon thermal treatment [J].
Hofmeister, H ;
Dutta, J ;
Hofmann, H .
PHYSICAL REVIEW B, 1996, 54 (04) :2856-2862