An integrated micro-optical system for VCSEL-to-fiber active alignment

被引：26

作者：

Ishikawa, K ^{[1
]}

Zhang, JL ^{[1
]}

Tuantranont, A ^{[1
]}

Bright, VM ^{[1
]}

Lee, YC ^{[1
]}

机构：

[1] Univ Colorado, NSF, Ctr Adv Mfg & Packaging Microwave Opt & Digital E, Boulder, CO 80309 USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2003年 / 103卷 / 1-2期

关键词：

MEMS; micromirror; VCSEL; optical fiber; coupling efficiency; alignment;

D O I：

10.1016/S0924-4247(02)00313-8

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, a new micro-optical system for VCSEL-to-fiber active alignment is described. An integrated microsystem platform, which has a thermally-actuated micromirror, a silicon etched v-groove and flip-chip function, is successfully fabricated and actuated for beam adjustment from a vertical-cavity surface-emitting laser (VCSEL) to a fiber. The micro-optical system has 4.0degrees maximum beam steering angle with the resolution of 0.08degrees/mA. With the steering angle reaching 2.5degrees, the coupling. efficiency from the VCSEL to the fiber improves to more than 80% from 9% initial efficiency of 25 mum misaligned fiber position. (C) 2003 Elsevier Science B.V. All rights reserved.

引用

页码：109 / 115

页数：7

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