Empirical modeling of the refractive index for (AlGaIn)As lattice matched to InP

被引:12
作者
Grasse, C. [1 ]
Boehm, G. [1 ]
Mueller, M. [1 ]
Gruendl, T. [1 ]
Meyer, R. [1 ]
Amann, M-C [1 ]
机构
[1] Tech Univ Munich, Walter Schottky Inst, D-85748 Garching, Germany
关键词
LAYERS; PARAMETERS;
D O I
10.1088/0268-1242/25/4/045018
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A composition-dependent empirical interpolation formula for the refractive index of AlGaInAs epilayers lattice matched to InP substrate has been determined by using a reflection spectroscopy technique. The 2 mu m thick (AlGaIn) As layers have been grown by MBE as well as MOVPE and were characterized by x-ray diffractometry and photoluminescence measurements. The measured data from these etalon structures were fitted by using a Sellmeier equation (single oscillator model) to retrieve the refraction index for wavelengths between 2.5 and 1 mu m. The resulting accurate expression will be very useful for designing optoelectronic devices like VCSELs.
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页数:4
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