Polishing performance of recyclable and reusable SiO2 magnetic nanoparticle-based polishing nanoabrasive

被引:4
作者
Amir, Md [1 ]
Mishra, Vinod [2 ]
Sharma, Rohit [1 ]
Ali, S. Wazed [3 ]
Khan, Gufran S. [1 ]
机构
[1] Indian Inst Technol Delhi, Ctr Sensors Instrumentat & Cyber Phys Syst Engn Se, New Delhi 110016, India
[2] CSIR, Cent Sci Instruments Org, Chandigarh 160030, India
[3] Indian Inst Technol Delhi, Dept Text Technol & Fiber Engn, New Delhi 110016, India
关键词
Precision optical polishing; SiO2; Polishing slurry; Optical glass; Recyclable nanoabrasive; CHEMICAL-MECHANICAL PLANARIZATION; PARTICLE-SIZE; AZO DYES; NANOCATALYST;
D O I
10.1016/j.matpr.2022.03.646
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Conventional polishing processes such as chemical-mechanical polishing (CMP) is explored to fabricate superfine optical glass or metal surfaces. These superfine surfaces are used for many advance optical engineering applications. The CMP process depends on two crucial factors, (i) slurry made of small abrasive particles and (ii) precision polishing pad. However, the commercially available polishing abrasives are non-recyclable and non-reusable. Therefore, nanomaterials are attracting considerable research interest from both academia and industries. The related research provides safe, reliable, sustainable, and efficient products for the required applications. Green nanotechnology and nanoscience make the chemical process cleaner and environment friendly. Thus, this study relates to the polishing performance of the recyclable and reusable hybrid nanoparticles-based polishing abrasive for optical polishing. The hybrid structures of nanoparticles have been prepared via a chemical route. The spherical morphology of the nanoabrasive has been observed via FE-SEM images. The particle size of the nanoabrasive was estimated as 32.24 nm, confirmed by the TEM image. The overall uniform spherical structure and high surface area of the prepared nanoabrasive provide uniform cutting tools effect and homogenous distribution on the surface of the polishing substrate, respectively. The BK-7 optical glass has been polished with the prepared hybrid nanoabrasive. The polishing performances and roughness in terms of time have improved to sub-nanometers. Due to the magnetic nature of the nanoabrasive, the used slurry was successfully recycled with the help of an external magnetic field.Copyright (c) 2022 Elsevier Ltd. All rights reserved. Selection and peer-review under responsibility of the scientific committee of the Sustainable Materials and Practices for Built Environment.
引用
收藏
页码:773 / 776
页数:4
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