Nonlinear dynamic analysis of electrostatically actuated resonant MEMS sensors under parametric excitation

被引：99

作者：

Zhang, Wen-Ming ^{[1
]}

Meng, Guang ^{[1
]}

机构：

[1] State Key Lab Mech Syst & Vibrat, Shanghai 200240, Peoples R China

来源：

IEEE SENSORS JOURNAL | 2007年 / 7卷 / 3-4期

基金：

中国国家自然科学基金;

关键词：

electrostatic force; microelectromechanical systems (MEMS); parametric excitation; resonant sensor;

D O I：

10.1109/JSEN.2006.890158

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Electrostatically actuated resonant microelectromechanical systems (MEMS) sensors have gotten significant attention due to their geometric simplicity and broad applicability. In this paper, nonlinear responses and dynamics of the electrostatically actuated MEMS resonant sensors under two-frequency parametric and external excitations are presented. The presented model and methodology enable simulation of the steady-state dynamics of electrostatic MEMS undergoing small motions. Response and dynamics of the MEMS resonator to a combination resonance are studied. The responses of the system at steady-state conditions and their stability are investigated using the method of multiple scales. The results showing the effect of varying the dc bias, the squeeze film damping, cubic stiffness, and ac excitation amplitude on the frequency response curves, resonant frequencies and nonlinear dynamic characteristics are given in detail. Frequency response, resonant frequency and peak amplitude are examined for variation of the dynamic parameters involved. This investigation provides an understanding of the nonlinear dynamic characteristics of microbeam-based resonant sensors in MEMS.

引用

页码：370 / 380

页数：11

共 31 条

[1] Secondary resonances of electrically actuated resonant microsensors [J].

Abdel-Rahman, EM ;

Nayfeh, AH .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2003, 13 (03) :491-501

[2] Independent tuning of linear and nonlinear stiffness coefficients [J].

Adams, SG ;

Bertsch, FM ;

Shaw, KA ;

MacDonald, NC .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 1998, 7 (02) :172-180

[3] Mechanical domain coupled mode parametric resonance and amplification in a torsional mode micro electro mechanical oscillator [J].

Baskaran, R ;

Turner, KL .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2003, 13 (05) :701-707

[4] Electrically tunable collective response in a coupled micromechanical array [J].

Buks, E ;

Roukes, ML .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2002, 11 (06) :802-807

[5] Parametric amplification in a torsional microresonator [J].

Carr, DW ;

Evoy, S ;

Sekaric, L ;

Craighead, HG ;

Parpia, JM .

APPLIED PHYSICS LETTERS, 2000, 77 (10) :1545-1547

[6] Dynamics of polysilicon parallel-plate electrostatic actuators [J].

Chu, PB ;

Nelson, PR ;

Tachiki, ML ;

Pister, KSJ .

SENSORS AND ACTUATORS A-PHYSICAL, 1996, 52 (1-3) :216-220

[7] Complex nonlinear oscillations in electrostatically actuated microstructures [J].

De, SK ;

Aluru, NR .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2006, 15 (02) :355-369

[8] Full-Lagrangian schemes for dynamic analysis of electrostatic MEMS [J].

De, SK ;

Aluru, NR .

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2004, 13 (05) :737-758

[9] Mechanical mixing in nonlinear nanomechanical resonators [J].

Erbe, A ;

Krömmer, H ;

Kraus, A ;

Blick, RH ;

Corso, G ;

Richter, K .

APPLIED PHYSICS LETTERS, 2000, 77 (19) :3102-3104

[10] A control scheme for a MEMS electrostatic resonant gyroscope excited using combined parametric excitation and harmonic forcing [J].

Gallacher, BJ ;

Burdess, JS ;

Harish, KM .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2006, 16 (02) :320-331

← 1 2 3 4 →