High Performance Amorphous Metal-Oxide Semiconductors Thin-Film Passive and Active Pixel Sensors

被引:0
作者
Zhang, Rui [1 ]
Bie, Linsen [1 ]
Fung, Tze-Ching [2 ]
Yu, Eric Kai-Hsiang [1 ]
Zhao, Chumin [1 ]
Kanicki, Jerzy [1 ]
机构
[1] Univ Michigan, EECS, Solid State Elect Lab, Ann Arbor, MI 48109 USA
[2] Qualcomm MEMS Technol Inc, San Jose, CA USA
来源
2013 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM) | 2013年
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中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, for the first time, we report on high performance amorphous In-Ga-Zn-O (a-IGZO) thin-film transistors (TFTs) based passive pixel sensor (PPS) and active pixel sensor (APS) circuits. Experimental results show that single-TFT PPS with a pitch length of 50 mu m can achieve a signal charge gain approaching to unity (Gain=0.93) under a fast readout time of 20 mu s and a dynamic range of 40dB. APS based on three a-IGZO TFTs, with a pitch length of similar to 100 mu m, established a high dynamic range of more than 60dB. 2-TFTs half active pixel sensor (H-APS) testing circuits are also designed to investigate the voltage gain (A(V)=Delta(VOUT)/Delta V-G) properties for the APS circuit in this work. For the a-IGZO APS, AV is measured to be similar to 1.25, and through normalization of the pixel capacitance (C-PIX) to a common value of 5pF, a large signal charge gain of 25 is obtained.
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