Modeling of aluminum via filling by forcefill

被引：6

作者：

Estrin, Y

Kim, HS

Kovler, M

Berler, G

Shaviv, R

Rabkin, E

机构：

[1] Tech Univ Clausthal, IWW, D-38678 Clausthal Zellerfeld, Germany

[2] Chungnam Natl Univ, Dept Met Engn, Taejon 305764, South Korea

[3] Tower Semicond Ltd, IL-23105 Migdal Haemeq, Israel

[4] Technion Israel Inst Technol, Dept Mat Engn, IL-32000 Haifa, Israel

来源：

JOURNAL OF APPLIED PHYSICS | 2003年 / 93卷 / 09期

关键词：

D O I：

10.1063/1.1565512

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A simple constitutive model was used to predict the efficiency of the aluminum forcefill process. The constitutive description-adopted from the one developed for bulk material-was implemented in a finite-element code and applied to simulate the forcefill process. The results are summarized in the form of a "forcefill map" showing isochrones (constant via filling time lines) on the pressure-temperature plane. Using such a diagram, it is possible to identify the process conditions that warrant complete via filling within a specified time. Comparison of the simulation results with experimental data demonstrates a semiquantitative agreement. (C) 2003 American Institute of Physics.

引用

页码：5812 / 5815

页数：4

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