Gas products and carbon deposition kinetics in chemical vapor deposition from propylene

被引:9
作者
Lu Cui-ying [1 ,2 ]
Cheng Lai-fei [1 ]
Zhang Li-tong [1 ]
Zhao Chun-nian [1 ]
机构
[1] Northwestern Polytech Univ, Natl Key Lab Thermostruct Composite Mat, Xian 710072, Peoples R China
[2] Yulin Coll, Sch Chem & Chem Engn, Yulin 719000, Peoples R China
关键词
Pyrocarbon; GC/MS; Kinetic studies; CVD; PYROCARBON DEPOSITION; PYROLYTIC CARBON; CHEMISTRY; METHANE; INFILTRATION; STABILITIES; ACETYLENE; PROPANE; PHASE; FIBER;
D O I
10.1016/S1872-5805(09)60014-7
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Gas products and chemical vapor deposition kinetics of pyrocarbon (PyC) formed during pyrolysis, of a propylene/argon mixture in the range 700-1200 degrees C were analyzed by out-line gas chromatography coupled with mass spectrometry and by in in-situ magnetic suspension balance, respectively. More than 30 components were identified. Benzene was the main product, substituting for naphthalene as the temperature increased. PyC was formed with in apparent activation energy of (137 +/- 25) kJ/mol, assumed to be controlled by the acetylene-forming reaction from 800 degrees C to 1000 degrees C. Whereas, above 1000 degrees C, the deposition behavior was representative of a combination between gas phase diffusion from the bulk flow to the solid surface and gas phase nucleation. Reaction models describing homogeneous gas phase PyC deposition reactions were derived. On the basis of these results, it reaction path scheme of PyC formation from propylene was proposed.
引用
收藏
页码:35 / 40
页数:6
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