Role of fluorite phase formation in the texture selection of sol-gel-prepared Pb(Zr1-x,Tix)O3 films on Pt electrode layers

被引:16
作者
Norga, GJ
Vasiliu, F
Fè, L
Wouters, DJ
Van der Biest, O
机构
[1] IMEC, Interuniv Microelect Ctr, B-3001 Louvain, Belgium
[2] Natl Inst Mat Phys, R-76900 Bucharest, Romania
[3] Katholieke Univ Leuven, MTM Dept, B-3001 Louvain, Belgium
关键词
D O I
10.1557/JMR.2003.0169
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Transmission electron microscopy-selected area electron diffraction studies were performed on as-pyrolyzed sol-gel-derived Pb(Zr1-xTix)O-3 films deposited on Pt electrode layers to elucidate the structural cause behind the large effects of pyrolysis conditions on orientation selection [L. F, G.J. Norga, H.E. Maes, and G. Maes, J. Mater. Res.. 16, 2499 (2001)]. The crystallinity of the intermediate pyrochlore phase, which forms during pyrolysis, was found to strongly depend oil pyrolysis conditions. Specifically, pyrolysis for 10 s at 350 degreesC was seen to result in conversion of the film to a well-crystallized, oxygen-deficient pyrochlore phase with the fluorite crystal structure (disordered pyrochlore). We speculate that formation of the metastable fluorite phase is favored by the reduced oxygen partial pressure, caused by burnoff of residual acetates. Longer pyrolysis times and/or higher pyrolysis temperatures result in a quasi-amorphous intermediate phase. The presence of the well-crystallized fluorite phase in the pyrolyzed film is seen to result in (111)-oriented films after crystallization, while pyrolyzed films consisting of a quasi-amorphous intermediate phase turn out (100) or mixed (100)/(111) oriented after crystallization. An explanation for the observed orientation effects, on the basis of the different surface energetics of fluorite versus perovskite structure oxides, is proposed.
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页码:1232 / 1238
页数:7
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