Emergent Chemical Mapping at Atomic-Column Resolution by Energy-Dispersive X-Ray Spectroscopy in an Aberration-Corrected Electron Microscope

被引：101
作者：
Chu, M. -W. [1 ]
Liou, S. C. [1 ]
Chang, C. -P. [1 ,2 ]
Choa, F. -S. [3 ]
Chen, C. H. [1 ,4 ,5 ]
机构：
[1] Natl Taiwan Univ, Ctr Condensed Matter Sci, Taipei 106, Taiwan
[2] Natl Taiwan Univ, Dept Mat Sci & Engn, Taipei 106, Taiwan
[3] Univ Maryland, Dept Comp Sci & Elect Engn, Baltimore, MD 21250 USA
[4] Natl Taiwan Univ, Dept Phys, Taipei 106, Taiwan
[5] Acad Sinica, Inst Atom & Mol Sci, Taipei 106, Taiwan
来源：
PHYSICAL REVIEW LETTERS | 2010年 / 104卷 / 19期
关键词：
STEM; DELOCALIZATION; IONIZATION; EELS;
D O I：
10.1103/PhysRevLett.104.196101
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
Chemical mapping at atomic-column resolution by energy-dispersive x-ray spectroscopy in a spherical aberration-corrected scanning transmission electron microscope (STEM) has been demonstrated for the 1.47-angstrom dumbbell structure in InGaAs. The structural imaging and the chemical information in the two-dimensional map are directly correlated. Comparisons with the other existing mapping techniques of STEM in conjunction with electron energy-loss spectroscopy were discussed from aspects of ionization interactions.
引用
收藏
页数：4
相关论文
共 24 条
  • [1] Atomic-resolution electron energy loss spectroscopy imaging in aberration corrected scanning transmission electron microscopy
    Allen, LJ
    Findlay, SD
    Lupini, AR
    Oxley, MP
    Pennycook, SJ
    [J]. PHYSICAL REVIEW LETTERS, 2003, 91 (10)
  • [2] DELOCALIZATION IN ELECTRON-IMPACT IONIZATION IN A CRYSTALLINE ENVIRONMENT
    ALLEN, LJ
    ROUSSOUW, CJ
    [J]. PHYSICAL REVIEW B, 1993, 47 (05): : 2446 - 2452
  • [3] [Anonymous], 2009, Transmission Electron Microscopy: A Textbook for Materials Science
  • [4] Two-dimensional mapping of chemical information at atomic resolution
    Bosman, M.
    Keast, V. J.
    Garcia-Munoz, J. L.
    D'Alfonso, A. J.
    Findlay, S. D.
    Allen, L. J.
    [J]. PHYSICAL REVIEW LETTERS, 2007, 99 (08)
  • [5] Grain boundary strengthening in alumina by rare earth impurities
    Buban, JP
    Matsunaga, K
    Chen, J
    Shibata, N
    Ching, WY
    Yamamoto, T
    Ikuhara, Y
    [J]. SCIENCE, 2006, 311 (5758) : 212 - 215
  • [6] Atomic-resolution chemical mapping using energy-dispersive x-ray spectroscopy
    D'Alfonso, A. J.
    Freitag, B.
    Klenov, D.
    Allen, L. J.
    [J]. PHYSICAL REVIEW B, 2010, 81 (10):
  • [7] Upper limits for the residual aberrations of a high-resolution aberration-corrected STEM
    Haider, M
    Uhlemann, S
    Zach, J
    [J]. ULTRAMICROSCOPY, 2000, 81 (3-4) : 163 - 175
  • [8] A practical approach for STEM image simulation based on the FFT multislice method
    Ishizuka, K
    [J]. ULTRAMICROSCOPY, 2002, 90 (2-3) : 71 - 83
  • [9] Decisive factors for realizing atomic-column resolution using STEM and EELS
    Kimoto, Koji
    Ishizuka, Kazuo
    Matsui, Yoshio
    [J]. MICRON, 2008, 39 (03) : 257 - 262
  • [10] Element-selective imaging of atomic columns in a crystal using STEM and EELS
    Kimoto, Koji
    Asaka, Toru
    Nagai, Takuro
    Saito, Mitsuhiro
    Matsui, Yoshio
    Ishizuka, Kazuo
    [J]. NATURE, 2007, 450 (7170) : 702 - 704
123