Recent advances in MEIS

被引：1
作者：
Moon, DaeWon [1 ]
机构：
[1] Daegu Gyeongbuk Inst Sci & Technol, Dept New Biol, Daegu 42988, South Korea
来源：
SURFACE AND INTERFACE ANALYSIS | 2020年 / 52卷 / 1-2期
基金：
新加坡国家研究基金会;
关键词：
ENERGY-ION-SCATTERING; GROWTH; RESOLUTION; STRAIN; SURFACE; FILMS;
D O I：
10.1002/sia.6708
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
In this perspective on recent advances in medium-energy ion scattering (MEIS), I focus on the current issues to make MEIS a practically powerful and useful analysis technique for nanostructured materials and devices after a brief summary of MEIS, thereby highlighting the need for an extensive review on the development of MEIS methodology and its application to a wide range of contexts.
引用
收藏
页码：63 / 67
页数：5
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