Large spin Hall effect of perpendicularly magnetized β-W/CoFeB/MgO layers with high thermal stability

被引：6

作者：

Wang, Lezhi ^{[1
,2
]}

Shi, Kewen ^{[1
]}

Peng, Shouzhong ^{[1
]}

Cao, Kaihua ^{[1
,2
]}

Yang, Huaiwen ^{[1
]}

Gao, Jianfeng ^{[2
]}

Zhao, Weisheng ^{[1
]}

Zhao, Chao ^{[1
,2
]}

机构：

[1] Beihang Univ, Sch Microelect, Fert Beijing Inst, BDBC, Beijing 100191, Peoples R China

[2] Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2019年 / 58卷 / 05期

基金：

中国国家自然科学基金;

关键词：

TUNGSTEN FILMS; ORBIT TORQUE; MICROSTRUCTURE;

D O I：

10.7567/1347-4065/ab0e32

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report a robust perpendicularly magnetized beta-W/CoFeB/MgO multilayer structure. For the first time, we demonstrate efficient spin-orbit torque (SOT) switching and a highly thermally stable annealing process with this structure using X-ray diffraction tests, the harmonic technique, and SOT-driven magnetization switching measurements. These results may enable applications of SOT-based magnetic random access memory, which is required for integration in the CMOS back-end-of-line process. (C) 2019 The Japan Society of Applied Physics

引用

页数：4

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