Large spin Hall effect of perpendicularly magnetized β-W/CoFeB/MgO layers with high thermal stability

被引:6
作者
Wang, Lezhi [1 ,2 ]
Shi, Kewen [1 ]
Peng, Shouzhong [1 ]
Cao, Kaihua [1 ,2 ]
Yang, Huaiwen [1 ]
Gao, Jianfeng [2 ]
Zhao, Weisheng [1 ]
Zhao, Chao [1 ,2 ]
机构
[1] Beihang Univ, Sch Microelect, Fert Beijing Inst, BDBC, Beijing 100191, Peoples R China
[2] Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
基金
中国国家自然科学基金;
关键词
TUNGSTEN FILMS; ORBIT TORQUE; MICROSTRUCTURE;
D O I
10.7567/1347-4065/ab0e32
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report a robust perpendicularly magnetized beta-W/CoFeB/MgO multilayer structure. For the first time, we demonstrate efficient spin-orbit torque (SOT) switching and a highly thermally stable annealing process with this structure using X-ray diffraction tests, the harmonic technique, and SOT-driven magnetization switching measurements. These results may enable applications of SOT-based magnetic random access memory, which is required for integration in the CMOS back-end-of-line process. (C) 2019 The Japan Society of Applied Physics
引用
收藏
页数:4
相关论文
共 38 条
[1]   Enhanced tunneling magnetoresistance and perpendicular magnetic anisotropy in Mo/CoFeB/MgO magnetic tunnel junctions [J].
Almasi, H. ;
Hickey, D. Reifsnyder ;
Newhouse-Illige, T. ;
Xu, M. ;
Rosales, M. R. ;
Nahar, S. ;
Held, J. T. ;
Mkhoyan, K. A. ;
Wang, W. G. .
APPLIED PHYSICS LETTERS, 2015, 106 (18)
[2]   Highly stable perpendicular magnetic anisotropies of CoFeB/MgO frames employing W buffer and capping layers [J].
An, Gwang-Guk ;
Lee, Ja-Bin ;
Yang, Seung-Mo ;
Kim, Jae-Hong ;
Chung, Woo-Seong ;
Hong, Jin-Pyo .
ACTA MATERIALIA, 2015, 87 :259-265
[3]   Granulation, Phase Change, and Microstructure - Kinetics of Phase Change. III [J].
Avrami, M .
JOURNAL OF CHEMICAL PHYSICS, 1941, 9 (02) :177-184
[4]   Phase, grain structure, stress, and resistivity of sputter-deposited tungsten films [J].
Choi, Dooho ;
Wang, Bincheng ;
Chung, Suk ;
Liu, Xuan ;
Darbal, Amith ;
Wise, Adam ;
Nuhfer, Noel T. ;
Barmak, Katayun ;
Warren, Andrew P. ;
Coffey, Kevin R. ;
Toney, Michael F. .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2011, 29 (05)
[5]   CURRENT-INDUCED SPIN ORIENTATION OF ELECTRONS IN SEMICONDUCTORS [J].
DYAKONOV, MI ;
PEREL, VI .
PHYSICS LETTERS A, 1971, A 35 (06) :459-&
[6]  
Fan YB, 2014, NAT MATER, V13, P699, DOI [10.1038/NMAT3973, 10.1038/nmat3973]
[7]   Giant Spin Hall Effect and Switching Induced by Spin-Transfer Torque in a W/Co40Fe40B20/MgO Structure with Perpendicular Magnetic Anisotropy [J].
Hao, Qiang ;
Xiao, Gang .
PHYSICAL REVIEW APPLIED, 2015, 3 (03)
[8]   Quantitative characterization of the spin-orbit torque using harmonic Hall voltage measurements [J].
Hayashi, Masamitsu ;
Kim, Junyeon ;
Yamanouchi, Michihiko ;
Ohno, Hideo .
PHYSICAL REVIEW B, 2014, 89 (14)
[9]  
Ikeda S, 2010, NAT MATER, V9, P721, DOI [10.1038/NMAT2804, 10.1038/nmat2804]
[10]   Formation of quasicrystals and amorphous-to-quasicrystalline phase transformation kinetics in Zr65Al7.5Ni10Cu7.5Ag10 metallic glass under pressure -: art. no. 094208 [J].
Jiang, JZ ;
Zhuang, YX ;
Rasmussen, H ;
Saida, J ;
Inoue, A .
PHYSICAL REVIEW B, 2001, 64 (09)