Large spin Hall effect of perpendicularly magnetized β-W/CoFeB/MgO layers with high thermal stability

被引：6
|
作者：
Wang, Lezhi [1 ,2 ]
Shi, Kewen [1 ]
Peng, Shouzhong [1 ]
Cao, Kaihua [1 ,2 ]
Yang, Huaiwen [1 ]
Gao, Jianfeng [2 ]
Zhao, Weisheng [1 ]
Zhao, Chao [1 ,2 ]
机构：
[1] Beihang Univ, Sch Microelect, Fert Beijing Inst, BDBC, Beijing 100191, Peoples R China
[2] Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 2019年 / 58卷 / 05期
基金：
中国国家自然科学基金;
关键词：
TUNGSTEN FILMS; ORBIT TORQUE; MICROSTRUCTURE;
D O I：
10.7567/1347-4065/ab0e32
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We report a robust perpendicularly magnetized beta-W/CoFeB/MgO multilayer structure. For the first time, we demonstrate efficient spin-orbit torque (SOT) switching and a highly thermally stable annealing process with this structure using X-ray diffraction tests, the harmonic technique, and SOT-driven magnetization switching measurements. These results may enable applications of SOT-based magnetic random access memory, which is required for integration in the CMOS back-end-of-line process. (C) 2019 The Japan Society of Applied Physics
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页数：4
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