Femtosecond pulsed laser patterning of poly(3,4-ethylene dioxythiophene)-poly(styrenesulfonate) thin films on gold/palladium substrates

被引：14
作者：
McDonald, Joel P.
Hendricks, Jeffrey L.
Mistry, Vanita R.
Martin, David C.
Yalisove, Steven M.
机构：
[1] Univ Michigan, Appl Phys Program, Ann Arbor, MI 48109 USA
[2] Univ Michigan, Dept Biomed Engn, Ann Arbor, MI 48108 USA
[3] Univ Michigan, Dept Mech Engn, Ann Arbor, MI 48109 USA
[4] Univ Michigan, Dept Biomed Engn, Ann Arbor, MI 48109 USA
[5] Univ Michigan, Dept Macromol Engn, Ann Arbor, MI 48109 USA
[6] Univ Michigan, Dept Mat Sci & Engn, Ann Arbor, MI 48109 USA
来源：
JOURNAL OF APPLIED PHYSICS | 2007年 / 102卷 / 01期
关键词：
D O I：
10.1063/1.2752137
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Femtosecond pulsed laser damage studies were performed on poly(3,4-ethylene dioxythiophene)-poly(styrenesulfonate) (PEDOT-PSS) films of varying thickness on Au/Pd substrates. The femtosecond laser induced damage thresholds of the PEDOT-PSS films were determined (0.007-0.03 J/cm(2)) and were found to behave similarly to metallic conductors as a function of film thickness. Femtosecond laser patterning of the PEDOT-PSS films was also performed, with minimum wire widths of 1.4 mu m produced at speeds of 1 mm/s. Discrete removal of the PEDOT-PSS films from the underlying substrate was also demonstrated, with the film cleared down to the depth of the substrate in linear channels as narrow as 4 mu m while maintaining the integrity of the substrate. (c) 2007 American Institute of Physics.
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页数：5
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